公息肉欲秀婷Temperature Measurement Products

Luxtron m920 Series

Fiber Optic Temperature Sensing for OEMs between -100 to 330ºC

Advanced Energy's Luxtron four-channel m924 and two-channel m922 semiconductor modules are designed for etcher and wafer fab equipment temperature monitoring of electrostatic chucks, chambers, and other devices. 
  • Mix and match components
  • Works with current semiconductor Luxtron brand Fluoroptic probes and fiber optic extensions
  • Built-in calibration tables match to custom AE probes for high accuracy measurements
  • Accuracy of up to ±0.05°C is achievable (probe dependent)

 

  • Overview
  • Technical Specs
  • Documents
  • Accessories
  • Service & Support

Overview

The complete Luxtron® m920 series OEM solution is built using the electronics module assembly with two boards plus probes. The main board contains fiber optic temperature sensing channels, digital output (RS232 ASCII and RS485 Modbus), and power connection. The analog output board provides 0 to 10 V or 4 to 20 mA output and is mounted above the main board. An optional metal enclosure is also available.

The m920 series system uses Fluoroptic® technology. The m920 series main board conditions the measurement signal from Fluoroptic probes and reports a calibrated temperature to the OEM control system.

Benefits

  • Achieve high accuracy and a high temperature range for different etching and wafer fab processes
  • Monitor faster ramp conditions with a fast sample rate
  • Gain better temperature measurements with this low noise solution
  • Take advantage of high reliability for low failure rates
  • Receive support supports custom integration and probe designs world-wide

Features

  • Two or four channels, expandable up to 64 with RS485 Modbus
  • Single PCB design with options for analog output and metal enclosure
  • Probes are immune to electomagnetic interference, such as high voltage, RF, plasma, and microwave
  • Backward compatible with Advanced Energy spring loaded and Accudisc probes
  • Custom probes available for semiconductor applications
  • Performance

    Channels

    m922: 2
    m924: 4

    Temperature Range

    -100 to 330°C (probe dependent)

    Measurement Resolution

    0.01°C

    Measurement Rate

    Up to 50 Hz per channel

    Accuracy

    ±0.05°C (probe dependent)

  • Environmental Specifications

    Operating Temperature

    公息肉欲秀婷-40 to 85°C

    H x W x L

    23.7  x 100.6  x 134.4 mm (main board)

    Housing

    Metal enclosure for electromagnetic shielding (optional accessory)

  • Communication

    Analog Output

    0 to 10 V or 4 to 20 mA

    Serial Output

    RS232 and RS485

    Protocol

    ASCII and Modbus (RS485)

  • Electrical

    Input Power

    +5 to 24 VDC nominal at 100 mA

  • Typical Applications

    • Plasma etch electrostatic chuck monitoring
    • Plasma shower monitor inside the chamber
    • Temperature monitoring outside the chamber
    • Wafer fab equipment temperature monitoring
    • Semiconductor and FPD processing using RF and plasma

     

Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.

Accessories

Luxtron Fiber Optic Probes

Patented Fluoroptic Probes that are Chemically Resistant and Immune to Electromagnetic Interference

Global Support & Services

Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.

Learn More

Applications Support & Consulting

公息肉欲秀婷Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.

Learn More

Warranties

Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.

Learn More

Product Support

Call
Inside the U.S.: 1.800.446.9167 (option 2)
Outside the U.S.


Email
Thin Film Support
Thermal Product Support
Other Technical Support

Contact Us

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